Patent Assignment
Reel/Frame 053029/0068
Assignment of Assignor's Interest
Recorded: 2020-06-24
Pages: 8
Assignors
D'ACHARD VAN ENSCHUT, JOHANNES FRANCISCUS MARTINUS
Executed: 2017-10-17
DRUZHININA, TAMARA
Executed: 2017-09-18
KUMAR, NITISH
Executed: 2017-09-18
ROY, SARATHI
Executed: 2017-09-20
HUANG, YANG-SHAN
Executed: 2017-09-18
DEN BOEF, ARIE JEFFREY
Executed: 2017-11-28
NIENHUYS, HAN-KWANG
Executed: 2017-09-18
VAN ZWOL, PIETER-JAN
Executed: 2017-09-18
ROOBOL, SANDER BAS
Executed: 2017-09-18
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Detecting Substrate Surface Variations