Patent Assignment
Reel/Frame 053038/0620
Assignment of Assignor's Interest
Recorded: 2020-06-25
Pages: 3
Assignor
MATSUYAMA, NOBORU
Executed: 2020-06-23
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Computer-Readable Recording Medium Using Color Information of Processing Liquid of Substrate