Patent Assignment
Reel/Frame 053091/0093
Assignment of Assignor's Interest
Recorded: 2020-06-30
Pages: 6
Assignors
TAPILY, KANDABARA
Executed: 2019-11-16
DEVILLIERS, ANTON
Executed: 2020-06-12
LEUSINK, GERRIT
Executed: 2019-11-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Forming and Using Stress-Tuned Silicon Oxide Films in Semiconductor Device Patterning