Patent Assignment
Reel/Frame 053091/0855
Assignment of Assignor's Interest
Recorded: 2020-06-30
Pages: 6
Assignors
TIEN, FU AN
Executed: 2019-10-18
HUANG, HSU-TING
Executed: 2020-05-23
LIU, RU-GUN
Executed: 2019-10-12
LO, SHIH-HSIANG
Executed: 2019-10-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Lithography Simulation Method