Patent Assignment
Reel/Frame 053106/0207
Assignment of Assignor's Interest
Recorded: 2020-07-02
Pages: 4
Assignor
FUJITA, AKIRA
Executed: 2020-06-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Apparatus and Etching Method