Patent Assignment
Reel/Frame 053110/0852
Assignment of Assignor's Interest
Recorded: 2020-07-02
Pages: 3
Assignor
YAMAZAKI, MASAHIRO
Executed: 2020-07-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Method and Plasma Processing Apparatus