Patent Assignment
Reel/Frame 053134/0869
Assignment of Assignor's Interest
Recorded: 2020-07-07
Pages: 5
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2017-05-09
FAN, CHI-HSIANG
Executed: 2017-05-11
ZHANG, YOUPING
Executed: 2017-05-16
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Substrate, Lithographic Method and Associated Computer Product