Patent Assignment
Reel/Frame 053154/0001
Assignment of Assignor's Interest
Recorded: 2020-07-08
Pages: 9
Assignors
NOBUKUNI, CHIKARA
Executed: 2020-06-24
OJIMA, TOMOAKI
Executed: 2020-06-26
ITAHASHI, TAKUYA
Executed: 2020-06-25
HORIGUCHI, RYOICHI
Executed: 2020-06-23
WAKAYAMA, SHOTA
Executed: 2020-06-25
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus and Liquid Processing Method