Patent Assignment
Reel/Frame 053171/0948
Assignment of Assignor's Interest
Recorded: 2020-07-10
Pages: 7
Assignors
CHEN, HSIANG-FU
Executed: 2020-06-29
HUNG, CHIA-MING
Executed: 2020-06-24
CHIU, I-HSUAN
Executed: 2020-06-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Semiconductor Device Comprising Different Types of Microelectromechanical Systems Devices