Patent Assignment
Reel/Frame 053189/0664
Assignment of Assignor's Interest
Recorded: 2020-07-13
Pages: 6
Assignors
QIN, CE
Executed: 2020-05-22
TAN, ZHONGKUI
Executed: 2020-05-22
FU, QIAN
Executed: 2020-06-08
LEE, SAM DO
Executed: 2020-07-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Silicon Oxide Silicon Nitride Stack Stair Step Etch