Patent Assignment
Reel/Frame 053206/0905
Assignment of Assignor's Interest
Recorded: 2020-07-14
Pages: 4
Assignors
OGIHARA, TSUTOMU
Executed: 2020-05-19
BIYAJIMA, YUSUKE
Executed: 2020-05-19
KANAYAMA, MASAHIRO
Executed: 2020-05-19
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Composition for Forming Silicon-Containing Resist Underlayer Film and Patterning Process