Patent Assignment
Reel/Frame 053239/0178
Assignment of Assignor's Interest
Recorded: 2020-07-17
Pages: 3
Assignors
MIN, WEI-LUN
Executed: 2020-04-17
WU, XUSHENG
Executed: 2020-04-17
LIU, CHANG-MIAO
Executed: 2020-04-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Device with Air Gaps Between Metal Gates and Method of Forming the Same