Patent Assignment
Reel/Frame 053240/0758
Assignment of Assignor's Interest
Recorded: 2020-07-17
Pages: 9
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Patent:
11,139,147 →
Application:
16/883,087 →