Patent Assignment
Reel/Frame 053253/0391
Assignment of Assignor's Interest
Recorded: 2020-07-20
Pages: 5
Assignor
KAWABUCHI, YOSUKE
Executed: 2020-07-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Drying Apparatus, Substrate Drying Method and Storage Medium