Patent Assignment
Reel/Frame 053254/0884
Assignment of Assignor's Interest
Recorded: 2020-07-20
Pages: 10
Assignors
KAJIWARA, HIDEKI
Executed: 2020-06-09
YONEMITSU, YUYA
Executed: 2020-06-03
YAMANAKA, SHINICHIRO
Executed: 2020-06-30
MIZUSHINO, SHINICHI
Executed: 2020-06-11
IIDA, NARUAKI
Executed: 2020-06-09
KAWAKAMI, KOHEI
Executed: 2020-06-29
AZUMA, TOHRU
Executed: 2020-06-04
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Coating Apparatus and Coating Method