Patent Assignment
Reel/Frame 053309/0371
Assignment of Assignor's Interest
Recorded: 2020-07-24
Pages: 7
Assignors
BERA, KALLOL
Executed: 2019-04-04
DZILNO, DMITRY A.
Executed: 2020-07-23
SUBRAMANI, ANANTHA K.
Executed: 2019-08-23
FORSTER, JOHN C.
Executed: 2019-08-30
TANAKA, TSUTOMU
Executed: 2020-04-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Shaped Electrodes For Improved Plasma Exposure From Vertical Plasma Source