Patent Assignment
Reel/Frame 053330/0087
Assignment of Assignor's Interest
Recorded: 2020-07-28
Pages: 3
Assignors
PEREZ-FALCON, VICTOR ANTONIO
Executed: 2017-09-07
CHIEDA, MICHAEL ANDREW
Executed: 2017-09-07
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Apparatus for and Method Cleaning a Support Inside a Lithography Apparatus