Patent Assignment
Reel/Frame 053348/0899
Assignment of Assignor's Interest
Recorded: 2020-07-30
Pages: 4
Assignors
OKUTANI, MANABU
Executed: 2020-07-08
ABE, HIROSHI
Executed: 2020-07-13
ISHIZU, TAKAAKI
Executed: 2020-07-08
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI,, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Device