Patent Assignment
Reel/Frame 053361/0950
Assignment of Assignor's Interest
Recorded: 2020-07-31
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Position Detection Apparatus, Exposure Apparatus, and Article Manufacturing Method