Patent Assignment
Reel/Frame 053368/0485
Assignment of Assignor's Interest
Recorded: 2020-07-31
Pages: 4
Assignors
OMI, MUNEYUKI
Executed: 2020-07-29
GOHIRA, TAKU
Executed: 2020-07-29
MURAKAMI, TAKAHIRO
Executed: 2020-07-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus and Cleaning Apparatus