Patent Assignment
Reel/Frame 053369/0075
Assignment of Assignor's Interest
Recorded: 2020-07-31
Pages: 8
Assignors
O'MEARA, DAVID
Executed: 2020-07-30
DIP, ANTHONY
Executed: 2020-07-30
IGETA, MASANOBU
Executed: 2020-07-31
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Systems and Methods for Improving Planarity using Selective Atomic Layer Etching (ALE)