Patent Assignment
Reel/Frame 053373/0958
Assignment of Assignor's Interest
Recorded: 2020-07-31
Pages: 4
Assignors
CHEN, SHIH-CHIANG
Executed: 2020-06-29
LEE, WEI-YANG
Executed: 2020-06-29
LIN, CHIA-PIN
Executed: 2020-06-29
PENG, YUAN-CHING
Executed: 2020-06-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method and Structure for Air Gap Inner Spacer in Gate-All-Around Devices