Patent Assignment
Reel/Frame 053402/0453
Assignment of Assignor's Interest
Recorded: 2020-08-05
Pages: 3
Assignors
PRASAD, BHASKAR
Executed: 2020-08-03
SAVANDAIAH, KIRANKUMAR NEELASANDRA
Executed: 2020-08-03
BREZOCZKY, THOMAS
Executed: 2020-08-03
YEDLA, SRINIVASA RAO
Executed: 2020-08-03
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus, System, and Method for Non-Contact Temperature Monitoring of Substrate Supports