Patent Assignment
Reel/Frame 053409/0019
Assignment of Assignor's Interest
Recorded: 2020-08-05
Pages: 3
Assignors
TANAKA, TSUTOMU
Executed: 2020-03-31
DZILNO, DMITRY A.
Executed: 2020-08-04
GARACHTCHENKO, ALEXANDER V.
Executed: 2020-05-11
TANAKA, KEIICHI
Executed: 2020-04-02
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Spatial Atomic Layer Deposition Chamber with Plasma Pulsing to Prevent Charge Damage