Patent Assignment
Reel/Frame 053493/0467
Assignment of Assignor's Interest
Recorded: 2020-08-14
Pages: 7
Assignors
ABE, CHIHIRO
Executed: 2020-06-10
SASAKI, TOSHIYUKI
Executed: 2020-06-11
HAYASHI, HISATAKA
Executed: 2020-06-12
OMURA, MITSUHIRO
Executed: 2020-06-15
IMAMURA, TSUBASA
Executed: 2020-06-10
Assignee
KIOXIA CORPORATION
1-21, SHIBAURA 3-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Etching Method, Semiconductor Manufacturing Apparatus, and Method of Manufacturing Semiconductor Device