Patent Assignment
Reel/Frame 053503/0821
Assignment of Assignor's Interest
Recorded: 2020-08-14
Pages: 3
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus and Methods for Manipulating Radio Frequency Power at an Edge Ring in Plasma Process Device