Patent Assignment
Reel/Frame 053509/0075
Assignment of Assignor's Interest
Recorded: 2020-08-17
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Multi-Beam Writing Method and Multi-Beam Writing Apparatus