Patent Assignment
Reel/Frame 053559/0993
Assignment of Assignor's Interest
Recorded: 2020-08-21
Pages: 3
Assignor
TAPILY, KANDABARA
Executed: 2020-08-19
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Mitigating Laterial Film Growth in Area Selective Deposition