Patent Assignment
Reel/Frame 053601/0785
Assignment of Assignor's Interest
Recorded: 2020-08-26
Pages: 2
Assignors
NI, TUQIANG
Executed: 2020-08-26
XU, LEI
Executed: 2020-08-26
TU, LEYI
Executed: 2020-08-26
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Radio Frequency Power Supply System, Plasma Processor, and Frequency-Tuning Matching