Patent Assignment
Reel/Frame 053603/0512
Assignment of Assignor's Interest
Recorded: 2020-08-26
Pages: 4
Assignors
KATO, KEITA
Executed: 2020-06-02
SHIRAKAWA, MICHIHIRO
Executed: 2020-06-02
GOTO, AKIYOSHI
Executed: 2020-06-02
KAWASHIMA, TAKASHI
Executed: 2020-06-02
KOJIMA, MASAFUMI
Executed: 2020-06-02
Assignee
FUJIFILM CORPORATION
26-30, NISHIAZABU 2-CHOME, MINATO-KU, TOKYO, 106-8620, JAPAN
Covered Property
(1)
Actinic Ray-Sensitive or Radiation-Sensitive Resin Composition, Resist Film, Pattern Forming Method, and Method for Manufacturing Electronic Device