Patent Assignment
Reel/Frame 053612/0726
Assignment of Assignor's Interest
Recorded: 2020-08-27
Pages: 2
Assignor
YOKOTA, AKIHIRO
Executed: 2020-08-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing System and Method of Processing Substrate