Patent Assignment
Reel/Frame 053618/0739
Assignment of Assignor's Interest
Recorded: 2020-08-27
Pages: 3
Assignors
BRUNEAU, ANTOINE
Executed: 2020-08-12
ONO, TAKASHI
Executed: 2020-08-21
DUSSARRAT, CHRISTIAN
Executed: 2020-08-21
Assignee
L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Heteroalkylcyclopentadienyl Indium-Containing Precursors and Processes of Using the Same for Deposition of Indium-Containing Layers