Patent Assignment
Reel/Frame 053623/0643
Assignment of Assignor's Interest
Recorded: 2020-08-28
Pages: 14
Assignors
KAL, SUBHADEEP
Executed: 2020-06-12
ITO, DAISUKE
Executed: 2020-08-27
FLAUGH, MATTHEW
Executed: 2020-06-11
MURAKI, YUSUKE
Executed: 2020-06-16
MOSDEN, AELAN
Executed: 2020-06-26
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Phase Etch with Controllable Etch Selectivity of Metals