Patent Assignment
Reel/Frame 053624/0359
Assignment of Assignor's Interest
Recorded: 2020-08-27
Pages: 4
Assignors
TERASAWA, TSUNEO
Executed: 2020-07-30
KANEKO, HIDEO
Executed: 2020-07-30
INAZUKI, YUKIO
Executed: 2020-07-30
KOSAKA, TAKURO
Executed: 2020-07-30
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Manufacturing Reflective Mask Blank, Reflective Mask Blank, and Method of Manufacturing Reflective Mask