Patent Assignment
Reel/Frame 053667/0655
Assignment of Assignor's Interest
Recorded: 2020-09-02
Pages: 5
Assignors
SHI, HONGFEI
Executed: 2018-03-26
WANG, JINZE
Executed: 2018-03-26
YANG, PENG-CHENG
Executed: 2018-03-26
WANG, LEI
Executed: 2018-03-26
FENG, MU
Executed: 2018-03-30
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Instant Tuning Method for Accelerating Resist and Etch Model Calibration