Patent Assignment
Reel/Frame 053672/0900
Assignment of Assignor's Interest
Recorded: 2020-09-02
Pages: 10
Assignors
VENTZEK, PETER
Executed: 2020-08-13
RANJAN, ALOK
Executed: 2020-08-17
TANIGUCHI, KENSUKE
Executed: 2020-08-02
MORIKITA, SHINYA
Executed: 2020-08-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Pulsed Capacitively Coupled Plasma Processes