Patent Assignment
Reel/Frame 053684/0409
Assignment of Assignor's Interest
Recorded: 2020-09-03
Pages: 5
Assignor
HATAKEYAMA, JUN
Executed: 2020-07-28
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process