Patent Assignment
Reel/Frame 053692/0446
Assignment of Assignor's Interest
Recorded: 2020-09-04
Pages: 4
Assignors
KOSHIMIZU, CHISHIO
Executed: 2020-09-01
KUBOTA, SHINJI
Executed: 2020-09-01
MARUYAMA, KOJI
Executed: 2020-09-01
DOKAN, TAKASHI
Executed: 2020-09-01
NAGAMI, KOICHI
Executed: 2020-09-01
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Control Method and Plasma Processing Apparatus