Patent Assignment
Reel/Frame 053692/0788
Assignment of Assignor's Interest
Recorded: 2020-09-04
Pages: 3
Assignor
MIMURA, TAKUHEI
Executed: 2020-07-20
Assignee
CANON TOKKI CORPORATION
10-1, SHINKO-CHO, NIIGATA, MITSUKE-SHI, 954-0076, JAPAN
Covered Property
(1)
Deposition Apparatus, Electronic Device Manufacturing Apparatus, and Deposition Method