Patent Assignment
Reel/Frame 053698/0854
Assignment of Assignor's Interest
Recorded: 2020-09-04
Pages: 4
Assignors
YANG, WENBING
Executed: 2019-03-15
MUKHERJEE, TAMAL
Executed: 2019-03-15
BROURI, MOHAND
Executed: 2019-03-15
TAN, SAMANTHA
Executed: 2019-03-16
PAN, YANG
Executed: 2019-03-15
KANARIK, KEREN JACOB
Executed: 2019-03-15
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching and Smoothing of Refractory Metals and Other High Surface Binding Energy Materials