Patent Assignment
Reel/Frame 053715/0484
Assignment of Assignor's Interest
Recorded: 2020-09-08
Pages: 4
Assignors
LIN, CHUAN WEI
Executed: 2020-06-24
LI, FU-HSIEN
Executed: 2020-06-24
LIN, YONG-JYU
Executed: 2020-06-24
CHEN, RONG-SHEN
Executed: 2020-06-30
TUNG, CHI-FENG
Executed: 2020-06-24
SHEN, HSIANG YIN
Executed: 2020-06-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
System for a Semiconductor Fabrication Facility and Method for Operating the Same