Patent Assignment
Reel/Frame 053715/0621
Assignment of Assignor's Interest
Recorded: 2020-09-08
Pages: 3
Assignors
LU, CHUN-CHIEH
Executed: 2020-08-04
YEONG, SAI-HOOI
Executed: 2020-08-03
LIN, YU-MING
Executed: 2020-08-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Seed Layer for Ferroelectric Memory Device and Manufacturing Method Thereof