Patent Assignment
Reel/Frame 053734/0165
Assignment of Assignor's Interest
Recorded: 2020-09-10
Pages: 3
Assignors
DOKAN, TAKASHI
Executed: 2020-09-07
KUBOTA, SHINJI
Executed: 2020-09-04
KOSHIMIZU, CHISHIO
Executed: 2020-09-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus