Patent Assignment
Reel/Frame 053736/0673
Assignment of Assignor's Interest
Recorded: 2020-09-10
Pages: 9
Assignors
GDOR, ITAY
Executed: 2020-07-28
LUBASHEVSKY, YUVAL
Executed: 2020-08-25
PASKOVER, YURI
Executed: 2020-08-23
UZIEL, YORAM
Executed: 2020-07-20
GUTMAN, NADAV
Executed: 2020-07-21
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Non-Orthogonal Target and Method for Using the Same in Measuring Misregistration of Semiconductor Devices