Patent Assignment
Reel/Frame 053737/0882
Assignment of Assignor's Interest
Recorded: 2020-09-10
Pages: 3
Assignor
SAWACHI, ATSUSHI
Executed: 2020-09-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Supply System, Plasma Processing Apparatus, and Control Method for Gas Supply System