Patent Assignment
Reel/Frame 053750/0677
Assignment of Assignor's Interest
Recorded: 2020-09-11
Pages: 4
Assignors
CHENG, PO-HSIEN
Executed: 2020-08-08
KO, CHUNG-TING
Executed: 2020-08-05
YU, TSUNG-HSUN
Executed: 2020-08-07
LEE, TZE-LIANG
Executed: 2020-08-05
CHUI, CHI ON
Executed: 2020-08-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method of Performing Atomic Layer Deposition