Patent Assignment
Reel/Frame 053775/0903
Assignment of Assignor's Interest
Recorded: 2020-09-15
Pages: 3
Assignee
ULVAC TECHNO, LTD.
2609-5, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8555, JAPAN
Covered Property
(1)
Substrate Lifting Apparatus and Substrate Transferring Method