Patent Assignment
Reel/Frame 053778/0519
Assignment of Assignor's Interest
Recorded: 2020-09-15
Pages: 4
Assignors
HU, LIANGFA
Executed: 2020-04-27
KHAJA, ABDUL AZIZ
Executed: 2020-06-10
BOBEK, SARAH MICHELLE
Executed: 2020-06-10
KULSHRESHTHA, PRASHANT KUMAR
Executed: 2020-04-27
SUZUKI, YOICHI
Executed: 2020-04-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Minimizing Substrate Backside Damage