Patent Assignment
Reel/Frame 053801/0743
Assignment of Assignor's Interest
Recorded: 2020-09-17
Pages: 6
Assignors
TANABE, MASAHARU
Executed: 2020-07-28
SEKIYA, KAZUNARI
Executed: 2020-07-29
INOUE, TADASHI
Executed: 2020-07-28
SASAMOTO, HIROSHI
Executed: 2020-07-28
SATO, TATSUNORI
Executed: 2020-07-26
TSUCHIYA, NOBUAKI
Executed: 2020-07-29
TAKEDA, ATSUSHI
Executed: 2020-07-29
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Plasma Processing Method, and Memory Medium