Patent Assignment
Reel/Frame 053805/0561
Assignment of Assignor's Interest
Recorded: 2020-09-17
Pages: 5
Assignors
GARCIA GRANDA, MIGUEL
Executed: 2018-10-16
MC NAMARA, ELLIOTT GERARD
Executed: 2018-10-23
GUITTET, PIERRE-YVES JEROME YVAN
Executed: 2018-12-10
BROUWER, ERIC JOS ANTON
Executed: 2018-10-22
SEGERS, BART PETER BERT
Executed: 2018-10-18
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method